In this study, the effect of the dimensions of the bottom plate and liquid height was investigated for high-frequency sonoreactors under a vertically irradiated system. The dimensions of the bottom plate did not significantly influence sonochemical activity considering power density. However, as the bottom plate was increased in size, the hydroxyl radical generation rate decreased because of a decrease in power density. It is therefore recommended that sonoreactors with bottom-plate dimensions close to those of the ultrasonic transducer module be used. Liquid height had a significant effect on sonochemical activity, but the trend of the activity considering power density changed as the initial pollutant concentration changed. In the case of low initial concentration of As(III) (1 mg/L), the maximum cavitation yield for As(III) oxidation was observed at liquid heights of 150 mm.