Maintenance is a vital system in a manufacturing company. The maintenance objectives are to ensure that the machine is in good condition, serviceable and safe to be operated in producing quality products. However, the system usually imposes a high cost system due to its ineffective activities. Therefore, this paper was written to review the factors affecting the maintenance effectiveness and methods used to measure its performance. In this paper, maintenance performance measurement methods are categorized into three groups, based on holistic, machine, and value factors. Each group is discussed based on the principles and techniques of the maintenance performance measurement methods, along with the example of its applications in the industry. The most common methods used are the holistic approach, overall equipment effectiveness (OEE), and balance score-card (BSC). These various methods have their own benefits and drawbacks, according to the area of measurement.