Superkapasitor MEMS khususnya dengan reka bentuk elektrod antara digit (IDE), telah menarik minat pada masa kini dalam bidang seperti bioMEMS, bioperubatan implan, peranti kuasa elektronik dan aplikasi berkuasa tinggi disebabkan kapasiti pengecasannya yang tinggi. Kajian ini membentangkan superkapasitor MEMS dengan lapisan nano grafin tumbuh di atas elektrod. Superkapasitor MEMS terdiri daripada silikon dioksida (SiO2), nikel, grafin, polipirol (Ppy) dan lapisan alkohol polivinil (PVA). Tumpuan diberikan kepada fabrikasi struktur lapisan nano grafin atas elektrod superkapasitor MEMS melalui beberapa proses seperti pemendapan wap kimia secara peningkatan plasma (PECVD), penyejatan alur e dan salutan pusing. Grafin tumbuh melalui proses PECVD selama 10 minit pada kuasa 40 Watt dan pada suhu antara 400°C dan 1000°C. Spektrum Raman menunjukkan puncak pada 1340 dan 1580 cm-1 mewakili jalur D dan G. Puncak 2D wujud dalam julat 2600 - 3000 cm-1. Nisbah bagi keamatan puncak 2D terhadap puncak G pada 1000°C adalah 0.43 menunjukkan kualiti yang baik bagi banyak lapisan grafin
A Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. The micropump uses a PZT: Pb(ZrTi)Ox ceramic plate to actuate a silicon membrane which bends when a voltage is applied to the piezoelectric actuator. The resultant reciprocating movement of the pump membrane is then converted into pumping effect. By integrating dynamic passive valves into the device, the pump would then operate continuously with volumetric pumping rate determined by the frequency of the driving voltage. Simulation work to determine the micropump fluidic characteristics was performed using CoventorWare MemFSI™ module. The pump was fabricated on a double side polished silicon wafer via simple two-mask micromachining process. The fabricated micropump, having an outer dimension of 14 mm × 14 mm × 2 mm, was then tested with DI (deionized) water as the test liquid. A driving voltage of 16 Vpp was applied to the PZT actuator. Pump rate of 4.98 nL per min was obtained at 0.673 kHz. The fabricated micropump envisages a promising pumping method to be implemented into drug delivery systems.
A comprehensive study on the spin-on-glass (SOG) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425oC in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.