Disposal methods, health effects and emission regulations for sulfur hexafluoride and its by-products

Sulfur hexafluoride (SF6) is the most potent greenhouse gas contributed by the power and semiconductor industries. The global emissions of gas in the past 10 years have increased tremendously due to lack of disposal routes. This was brought to 190 nations' attention in the Kyoto Protocol for the need of emission control measures to reduce its impacts of climate change and global warming. Various novel techniques have surfaced to tackle this issue, such as non-thermal plasma (NTP) which includes radio frequency plasma, microwave plasma, dielectric barrier discharge, and electron beam. The main by-products resulting from the decomposition of SF6 by these techniques are sulfur oxyfluorides, sulfur dioxide, hydrofluoric acid, and fluorine gas. This environmental and health effects as well as global emission of SF6 gas are considered a threat to humans and the climate, where modern disposal methods of contaminated SF6 gas and its by-products should replace the conventional approaches. Relevant government policies on the safety and disposal concern of SF6 gas are reviewed and challenges and further research directions for the disposal of SF6 gas are highlighted in this review article.